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1. link.springer.com › article › 10Development of bipolar electrostatic chucks with a compliant ......

   link.springer.com › article › 10

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   Abstract. This paper describes the development of bipolar electrostatic chucks with a compliant beam-array structure using abrasive water jet technology. The chucks are cut out from 3D-printed composite-laminated plates and the attractive forces that they generate are measured.

2. euvlsymposium.lbl.gov › pdf › 2007Comparison of Coulombic and Johnsen-Rahbek Electrostatic Chucking...

   euvlsymposium.lbl.gov › pdf › 2007

   Type of chuck is characterized by the dielectric material and the resulting mechanism of force generation. Chucks can be either monopolar or bipolar. Slab-type or pin-type based on the surface characteristics. A pin-type chuck is proposed to minimize the effects of particles.

3. iopscience.iop.org › article › 10Development of a bipolar electrostatic chuck with a compliant...

   iopscience.iop.org › article › 10

   21 de ene. de 2022 · This study proposes and verifies bipolar electrostatic grippers stacking 3D-printed-layered modules consisting of arrays of elastically deformable bipolar beams. The influence of the mechanical compliance of grippers on the attractive force that it generates is clarified by comparing two types of modules having either high or low ...

4. www.researchgate.net › figure › Fundamental-structure-of-a-bipolar-electrostaticFundamental structure of a bipolar electrostatic chuck.

   www.researchgate.net › figure › Fundamental-structure-of-a-bipolar-electrostatic

   A bipolar electrostatic chuck (ESC) is a device that clamps target objects using a uniform electrostatic force. Traditional ESCs cannot satisfy these demands because of their planar surfaces.

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6. www.researchgate.net › publication › 357762675_Development_of_a_bipolar(PDF) Development of a bipolar electrostatic chuck with a...

   www.researchgate.net › publication › 357762675_Development_of_a_bipolar

   11 de ene. de 2022 · PDF | This study proposes and verifies bipolar electrostatic grippers stacking 3D-printed-layered modules consisting of arrays of elastically deformable... | Find, read and cite all the research...

7. pubs.aip.org › avs › jvbGeneration mechanism of residual clamping force in a bipolar ...

   pubs.aip.org › avs › jvb

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   24 de nov. de 2003 · Clamping and residual clamping forces of a Johnsen–Rahbek-type (JR-type) bipolar electrostatic chuck (ESC), which has electrically independent dual electrodes, were measured. Area ratios of the ESC’s two electrodes ranged from 1 to 4.6.

8. pubs.acs.org › doi › 10Bipolar Electrodes: A Useful Tool for Concentration, Separation,...

   pubs.acs.org › doi › 10

   Bipolar Electrodes: A Useful Tool for Concentration, Separation, and Detection of Analytes in Microelectrochemical Systems. Over the past decade, bipolar electrochemistry has emerged from relative obscurity to provide a promising new means for integrating electrochemistry into lab-on-a-chip systems. This article describes the fundamental ...